Digital to Analog Convertor
Having continued to grow as a manufacturer of weighing and measuring instruments, A&D is now going further with active challenges to up-and-coming businesses using unique technological skills accumulated over almost three decades.
In recent years, A&D has especially focused on A/D and D/A conversion devices and electron beam businesses supporting semiconductor development.
Semiconductor integrated circuits such as microprocessors and computer memories are constantly required to offer more capacity and to achieve further miniaturization. For this reason, light source used in lithography is shifting toward an electron beam radiated from an electron gun with a shorter wavelength than that of the common laser beam. A&D started developing electron guns early on and successfully developed those offering top of the range high voltage output and excellent stability operation rate. In addition, this technology has prospects for use in DVD mastering and is currently used with ion guns for surface analysis.
Furthermore, A&D has the advantage having developed peripheral circuitries to control electron beam. The A/D and D/A conversion technologies that A&D is extremely proud of are currently applied to ultra high-speed, highly accurate D/A converters (DAC) for beam deflection circuits to control the direction of electron beam radiation. A&D’s blanking circuits for controlling beam radiation intervals and lens aligner for controlling beam diameter, etc. are also highly recommended by professionals in the industry.
Highlights
Semiconductor integrated circuits such as microprocessors and computer memories are constantly required to offer more capacity and to achieve further miniaturization. For this reason, light source used in lithography is shifting toward an electron beam radiated from an electron gun with a shorter wavelength than that of the common laser beam. A&D started developing electron guns early on and successfully developed those offering top of the range high voltage output and excellent stability operation rate. In addition, this technology has prospects for use in DVD mastering and is currently used with ion guns for surface analysis.
Furthermore, A&D has the advantage having developed peripheral circuitries to control electron beam. The A/D and D/A conversion technologies that A&D is extremely proud of are currently applied to ultra high-speed, highly accurate D/A converters (DAC) for beam deflection circuits to control the direction of electron beam radiation. A&D’s blanking circuits for controlling beam radiation intervals and lens aligner for controlling beam diameter, etc. are also highly recommended by professionals in the industry.
Features
Main deflection amplifier Specifications
| Output voltage | ±400V max |
|---|---|
| Settling Time | 60 µS (Full Swing) |
| Resolution | 18-bit |
| Linearity | ±1/2LSB (17-bit) |
| Temperature Coefficient | < ±8ppm/2°C, 1 hr |
| Noise | < ±1LSB |
Sub deflection amplifier Specifications
| Output voltage | ±37.5V max. (POS, NEG) |
|---|---|
| Settling Time | 50 nS less |
| Resolution | 12-bit |
| Linearity | ±1/2LSB (12-bit) |
| Temperature Coefficient | < ±100ppm/2°C, 1 hr |
| Noise | < ±1LSB |
| Permissible Load | < 30 PF |
| Output Offset | Within ±3.2% of FS |
Lens and Aligner Specifications
Lens out : 4 ch
| Output Current | ±2 A |
|---|---|
| Stability | < ±1ppm |
Lens out : 4 ch
| Output Current | ±2 A |
|---|---|
| Stability | < ±10ppm |
